Micro Electro Mechanical Systems (MEMS) Testing

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【AFORE】AIOLOS

【AFORE】AIOLOS

AIOLOS - Wafer level test handler for environmental sensors

Wafer level test handler for environmental sensors with with physical stimulus Vacuum probing, pressure probing, gas probing, humidity probing - AIOLOS is solution for these and much more.

Very high UPH capacity and the lowest cost of test (COT)

AIOLOS has a unique automatic precision wafer prober placed inside chamber. Vacuum, pressure, humidity or gas stimulus is applied to whole wafer and wafer can be probed in stabile environment. Closed chamber with controlled humidity is perfect solution for temperature probing and lightless chamber can be utilized in testing of photonics in wafer level.

AIOLOS is a solution for wafer level testing of pressure and environmental sensors, on bare wafer or on blue tape after dicing.

AIOLOS stimulus options for environmental sensors

  • Pressure stimulus options
  • Humidity
  • Gases (on request)
  • Temperature

With multiple touch-down method AIOLOS produces high capacity.

Wafer sizes up to 8” are applicable.


 AFORE Oy

AFORE is a pioneer in MEMS test equipment industry and offers a range of advanced test solutions for MEMS devices, including the world's only commercial Wafer-Level Chip Scale Packaging (WLCSP) MEMS test solution for motion sensors. Afore's solutions are used in MEMS development ad manufacturing in the automotive, industrial, and consumer sectors in Europe, USA and Japan. Afore was founded in 1995 and serves its global customers from its headquarters in Lieto, Finland.

Contact and consultationhttp://www.spirox.com.tw/en/contact