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MicroLED Inspection System

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【Southport】JadeML - Mass Wafer Photoluminescence and Non-contact Leakage Detection Solution

【Southport】JadeML - Mass Wafer Photoluminescence and Non-contact Leakage Detection Solution
  • 100% Non-contact luminescence characteristics and leakage detection of MicroLED chips before mass transfer
  • Ensure effective MicroLED chips binning
  • Ensure effecitive chip transfer
  • Significant maintenance cost reduction

 

【Features】

  • 3-in-1 non-contact wafer-level MicroLED chip inspection
  • Minimal MicroLED inspection chip size down to 5 μm
  • 100% chip photoluminescence strength detection, mapping and binning with 1 μm spatial resolution
  • Spectral mapping on the wafer
  • 100% chip mapping with 0.5 nm spectral resolution, and provide information including PL intensity, dominant and peak wavelength, full width at half maximum value (FWHM)
  • 100% non-contact leakage detection and binning
 
 

【Advantages】

  • When the number of chips increase exponentially, the 100% inspection of chip can only achieve thru non-contact detection technology at wafer level
  • Provide the PL, spectral, and leakage characteristics of each MicroLED chip
  • High spatial resolution and high wavelength resolution can promptly and accurately reflect the performance of various characteristics of chips for effective analysis and binning
  • Leakage chips are detected before mass transfer to avoid ineffective transfer of NG chips and subsequent repairing, resulting in significant cost reduction

 

【Benefits】

  • As MicroLED chip size becomes smaller, non-contact inspection can effectively prevent the potential damage to chips easily caused by the contact probe method.
  • The 3-in-1 non-contact wafer-level MicroLED chip inspection saves a lot of time and cost and eliminates the need to switch to other platforms for various inspection items.
  • Effective binning of chips at the wafer stage before mass transfer.
  • Ineffective and wasteful mass transfer of NG chips and subsequent repairing can be prevented resulting in significant cost reduction.
  • JadeML technology is beneficial for continuous process monitoring and improvement.

 

【产品参数】

Model Number
ML7000
Model Name
JadeML
R, G, B MicroLED Chip
on Wafer
2" 4" 6"
Inspection Items
Whole Wafer PL Scan
PL Intensity
PL Wavelength
PL FWHM
PL Dominant Wavelength
Non-contact Whole Wafer Leakage Chip Detection
Spatial Resolution
Standard Mode
(MicroLED Chip > 20 µm)
2 µm / pixel
High Resolution Mode
(MicroLED Chip 5 - 20 µm)
1 µm / pixel
Spectral Resolution
1 nm
Measurement Time
(@4” Wafer)
Standard Mode
PL Scan：7.5 mins
Leakage Detection：15 mins
High Resolution Mode
PL Scan：30 mins
Leakage Detection：60 mins
 
 

Southport Co. was established in August 2014. The founding team gathered talents from cross fields such as optics, materials, physics, and information, introducing novel optical design concepts in optical engineering.Based on the two core technologies of 5D microscopy and digital optics, Southport has introduced brand-new optics concepts and technologies into four key application areas: advanced material analysis, biomedical imaging, microstructure and transparent material inspection, and digital optics. Southport is committed to focusing on solving critical problems for R&D, relieving the pains in practices for facilitating innovation. Through integrating the knowledge of light, mechanics, electronics, and software, incorporated with modular and digital design genes, and further combined with our knowledge and experiences, Southport is ready to provide the cutting-edge optical tools needed by academia and industry.