Opus3 is the only prober in the market which handles 6", 8" and 12" SEMI Standard wafer, without having any change kit. It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput. It is possible to load universal probe card.
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Opus3
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Wafer Size
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6, 8, 12 inch
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X, Y Probing Area
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X：±175mm
Y：±165mm
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Needle Force
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500Kg
(depending on the model)
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X, Y Accuracy
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X：±1.5㎛
Y：±1.5㎛
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Tri-Temp
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Cold: -40℃ / -55℃
Hot: 150℃ / 200℃
Ambient Control (25℃)
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SEMICS Inc., a semiconductor probe equipment manufacturer in Korea, founded in 2000. OPUS3 SP/HD is adopted in 6”, 8” and 12” wafer production and testing, is one of the most competitive prober in semiconductor industry. As a leading company in providing wafer level probing solutions, SEMICS has a number of core patents in semiconductor probe equipment at home and abroad to fulfill customer needs in various aspects.
