Non-Destructive TGV Laser Modification Inspection System
Tomogram of Laser Modification for Superior Pre-Etching Quality Assessment & Precision Control for Success!
PRODUCT DESCRIPTION
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Exclusive Patented SpiroxLTS Technology
Advanced non-linear optical measurement with SpiroxLTS Technology for the improvement of the laser modification to best match the glass processing. -
No Destruction on Sample
Non-destructive inspection with SpiroxLTS enables precise control of laser modification performance, significantly reducing process costs and optimizing production conditions!
TGV Manufacturing Process Optimization: Key Role in Process Parameter Optimization
Laser Modification
Laser Modification Impact on Post-Etching TGV
3D Tomogram : Continuity and Uniformity of Laser Modification
Dynamic Tomogram of Laser Modification
It’s able to observe Laser modification variations along the vertical depth changes.
Tracking Function of Dynamic Tomogram of Laser Modification
▯ : Inspection Area ● : Observation Center ⬯ : Criteria Mask
TGV Etching
TGV Dimension Measurement
Roughness Calculation after Via Etching
It’s able to observe the difference of A & B by 3D profile image; Adopt Z axis resolution with precise level and inspection of micro area, the roughness could be calculated.
Metallization
Crack inspection after TGV Metallization & CMP
CPO & MORE APPLICATIONS
Co-Packaged Optics (CPO) Applications
Cavity in CPO Applications
Glass Optical Waveguide in CPO Applications
It’s able to inspect the waveguide structure made by laser modification in the glass, and observe its profile with 3D image!
Dicing Lane Inspection
Laser Modification: Dicing Lane
After Etching: Dicing Lane Inspection
FEATURES
ADVANTAGES
The only technology for inspecting laser modification continuity and uniformity, providing early prediction of etched perforation outcomes after laser modification.
Tomogram of laser modification enables rapid adjustment of laser parameters and optimization of optical path design, significantly saving process development time.
Offering a more efficient, direct, and concrete inspection method without destruction.
Identify the waist position, critical dimensions, roundness, and the impact area, length, and depth of cracks after metallization.
FUNCTION DESCRIPTION
Significantly shortens development time and effectively reduces R&D costs. Precisely select laser source and glass material to ensure that TGV laser modification and through-via etching meet manufacturing quality specifications.
Monitor laser modification quality before etching, providing real-time prediction on whether etching is necessary, avoiding blind etching from past practices and preventing unnecessary cost waste.
Monitor TGV quality, reduce product defects, increase output, and prevent the batch costs associated with ineffective yield.
PRODUCT SPECIFICATIONS
| Item | Content |
|---|---|
| Model Number | SP8000G |
| Model Name | Non-Destructive Laser Modification Inspection System |
| Key Optical Technology | Patented SpiroxLTS Non-linear Optical Inspection (Application wavelength 1200 - 1800 nm) |
| Applicable Substrate Size |
Standard: 310 mm x 310 mm Maximum: 510 mm x 515 mm |
| Measurement Items |
Tomogram of Laser Modification, 3D Tomogram of Laser Modification, Dynamic Tomogram of Laser Modification; TGV Aperture Size and Roundness Measurement, TGV Waist Depth Positioning, TGV 3D Profile Image, TGV Cross Section Analysis; Crack Inspection after TGV Metallization & CMP |
| FOV / Measurement Time |
FOV 400 µm x 400 µm @ 20x objective magnification； 3.5 seconds / frame (Scanning resolution: 512 x 512 pixels)；100 frames ≒ 6 minutes |
| Inspection Modes | Micro-area imaging, sub-region automatic measurement, coordinate-based automatic measurement, random automatic measurement, script scanning process. |
| Measurement Resolution |
Image Minimum Resolution 0.5 µm |
| Movement Accuracy | X-Y axis Precision 0.1 µm, Z axis Precision 0.02 µm |
| Load & Unload |
Standard: Manual (Reserve space for EFEM upgrade) Maximum: Manual |
| Equipment Dimension / Weight |
Standard: Length 2.375 m x Width 1.780 m x Height 1.900 m Weight 2700 kg (Tentative) Maximum: Length 2.600 m x Width 1.600 m x Height 1.900 m Weight 3500 kg (Tentative) |
| Electrical Specification |
220 V 60 Hz AC 4400 W (Tentative) |
