PRODUCTS
PRODUCTS
Spirox Laser Tomography Scan System
Semiconductor IC Testing Equipment
Semiconductor Packaging Equipment
Lab Wafer and Chip Inspection Equipment
Mass Production Chip Inspection Equipment
ATE/Prober Board Repair Service
Accessories
Spirox Laser Tomography Scan System
COMPETENCE
WHY SPIROX
Spirox (TWSE: 3055) is a leading professional brand in the global semiconductor equipment industry. We offer advanced, comprehensive products and services to meet the needs of semiconductor manufacturing processes and diverse products, including equipment for testing, packaging, inspection, and verification, along with application engineering and customer support.
Extensive Industry Experience
Innovative R&D Capabilities
Global
Partners
Partners
Strong Financial Stability
08
/ Dec / 2025
Latest News
Spirox (TWSE: 3055), a leading semiconductor equipment provider, announced another breakthrough with its industry-first patented Spirox Laser Tomography Scan (SpiroxLTS®) technology. Spirox has introduced a dual-optical-path module for its SP8000S non-destructive TSV inspection system, enabling high precision measurement of individual TSV depth, sidewall defects, and bottomresidues. This advancement helps customers overcome long-standing process bottlenecks by these measurements. Spirox confirmed that the SP8000S system has passed customer qualification and received a confirmed purchase order, with shipments scheduled for next year and expected to contribute directly to revenue and profitability.
NEWS
LATEST NEWS
05
/ Jan / 2026
Latest News
Spirox Launches ESG Section on Its Official Website to Strengthen Sustainable Governance
Amid the growing global momentum toward sustainability, Spirox is actively advancing a comprehensive ESG governance framework. To enhance information transparency and fulfill its responsibilities as a responsible corporate citizen, Spirox today officially launched the ESG section on its corporate website.
19
/ Jun / 2025
Latest News
Spirox Shanghai Office Relocation Notice
As part of our business development strategy, Spirox Technology (Shanghai) Co., Ltd. has relocated its Shanghai office from Room 3201, Building 2, No. 1077 Zuchongzhi Road to Zhangjiang Micro-Electronics Port, effective June 1, 2025.
17
/ Jun / 2025
Latest News
Industry-First! SpiroxLTS Reveals the True Quality of TGV Laser-Modified Vias Accelerating TGV Mass Production
Professional semiconductor equipment provider Spirox Corporation (TWSE: 3055) has introduced the industry-first SpiroxLTS (Spirox Laser Tomography Scanning) technology. Leveraging a combination of multiple patented nonlinear optical integration technologies, this innovative solution enables non-destructive, contact-free, damage-free direct imaging of laser-modified cross-sections within through glass vias (TGV). SpiroxLTS delivers precise insights into laser modification effectiveness, fully visualizing the continuity and uniformity of modifications within the glass, ensuring that process quality meets stringent design requirements. This breakthrough brings a revolutionary advancement in process parameter control for TGV fabrication and will help TGV manufacturers accelerate their mass production timelines.



